Molecular dynamics simulations for gas cluster ion beam processes
نویسندگان
چکیده
منابع مشابه
Epitaxial growth on gas cluster ion-beam processed GaSb substrates using molecular-beam epitaxy
Chemical mechanical polished ~CMP! ~100! GaSb substrates were processed using gas cluster ion beams ~GCIB! to improve surface smoothness, reduce subsurface damage, and produce a thermally desorbable oxide layer for molecular-beam epitaxy ~MBE! overgrowth. In this article, we report the growth of GaSb/AlGaSb epilayers on GCIB processed GaSb substrates. The substrates were processed using either ...
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ژورنال
عنوان ژورنال: Vacuum
سال: 2010
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2009.11.018